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Line Edge Roughness Analysis and Simulation at Advanced Litho Process

Yufei Sha, Jiahao Xi,Liang Li,Miao Jiang,Di Liang, Ran Zhang, Ganlin Song, Enqiang Tian, Xiuyan Cheng, Futian Wang, Cuixiang Wang,Guangying Zhou,Mingyi Yao,Jiangliu Shi

2023 International Workshop on Advanced Patterning Solutions (IWAPS)（2023）

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关键词
Litho,Photoresist,Roughness,Simulation,Aerial Image
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