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Wafer-level Characterization and Monitoring Platform for Single-Photon Avalanche Diodes

Samuel Parent,Frederic Vachon,Valerie Gauthier, Steve Lamoureux, Alexandre Paquette,Jacob Deschamps,Tommy Rossignol,Nicolas Roy,Philippe Arsenault,Henri Dautet,Serge A. Charlebois,Jean-Francois Pratte

IEEE Journal of the Electron Devices Society（2024）

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Key words
Active probe card,photon-to-digital converter,process control monitoring,silicon photomultiplier,single-photon avalanche diode,wafer-level testing
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