Non-destructive Detection of Sub-Micrometer-sized Micropipes in Silicon Carbide Using Mirror Electron MicroscopeKeisuke Kobayashi,Yuki Mori,Kumiko Konishi,Masaki Hasegawa,Kenji Kobayashi,Akio ShimaJOURNAL OF APPLIED PHYSICS（2023）引用 0|浏览11AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
