Plasma-Based Etching Approach for GEM Detector Microfabrication at FBK for X-ray Polarimetry in Space
Journal of Instrumentation（2024）
关键词
Detector design and construction technologies and materials,Micropattern gaseous detectors (MSGC,GEM,THGEM,RETHGEM,MHSP,MICROPIC,MICROMEGAS,InGrid,etc),Polarimeters,Space instrumentation
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