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Low Dit of $(2-4)\Times 10^{10}$ Using Y2O3/epi-Si/Ge Gate Stacks

Hsien-Wen Wan,Yi-Ting Cheng,C. K. Cheng, Tien-Yu Chu,Tun‐Wen Pi,J. Kwo, M. Hong

openalex（2023）

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