Fast Response Infrared Detector Using a Radially Distributed Dual-Layer Thermopile

Zhaohui Yang,Gaobin Xu,Shirong Chen,Jianguo Feng,Xing Chen,Yuanming Ma,Yongqiang Yu,Baichuan Sun

IEEE Sensors Journal（2023）

引用 1|浏览2

关键词

Detectors,Thermocouples,Time factors,Sensors,Thermal conductivity,Silicon,Temperature measurement,Fast response,infrared (IR) detector,microelectromechanical system (MEMS),thermopile

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