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Calculation Method for Characteristic Parameters of Rectangular Gratings under Batwing Effect

Fan Xiaoxin,Zhang Jiale,Gao Zhishan,Ma Jianqiu, Li Heran, Chen Lu,Lei Lihua,Fu Yunxia,Xu Zhiyi,Zhu Dan,Guo Zhenyan,Yuan Qun

Acta Optica Sinica（2023）

Cited 0|Views4
Key words
microscopic interferometry,rectangular grating,batwing effect,characteristic parameter,binarization
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