Laser Processing of Silicon with GHz Burst Pumped Third Harmonics for Precise Microfabrication.
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING, LAMOM XXIX（2024）
Key words
laser processing,GHz burst,silicon microfabrication
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined