Nanosecond Laser-Induced Micro-Modifications in Bulk of Crystal Silicon
2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)（2023）
Key words
crystal silicon,femtosecond laser,nanosecond laser pulses,nanosecond laser-induced micromodification,picosecond laser,Si/el,wavelength 1550 nm
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