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Imaging Threading Dislocations and Surface Steps in Nitride Thin Films Using Electron Backscatter Diffraction.

Kieran P. Hiller,Aimo Winkelmann,Ben Hourahine, Bohdan Starosta,Aeshah Alasmari,Peng Feng,Tao Wang,Peter J. Parbrook,Vitaly Z. Zubialevich,Sylvia Hagedorn,Sebastian Walde,Markus Weyers,Pierre-Marie Coulon,Philip A. Shields,Jochen Bruckbauer,Carol Trager-Cowan

Microscopy and Microanalysis（2023）

引用 1|浏览48
关键词
SEM,nitrides,thin film semiconductors,extended defects,dislocations,EBSD
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