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Ferroelectricity of Pristine Hf0.5Zr0.5O2 Films Fabricated by Atomic Layer Deposition

Luqiu Chen, Xiaoxu Zhang,Guangdi Feng,Yifei Liu,Shenglan Hao,Qiuxiang Zhu,Xiaoyu Feng,Ke Qu,Zhenzhong Yang,Yuanshen Qi,Yachin Ivry,Brahim Dkhil,Bobo Tian,Junhao Chu, Chungan Duan

CHINESE PHYSICS B（2023）

Cited 2|Views31
Key words
Hf0.5Zr0.5O2 (HZO),ferroelectric,orthorhombic,without annealing
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