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Influence of Fluence and Pulse Number on Laser Cleaning of Atmospheric‐Pressure‐Plasma‐Jet‐Etched Optical Glasses

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE(2024)

Cited 2|Views6
Key words
N-BK7,plasma etchings,pulsed UV laser irradiations,reactive fluorine species,residual layers,Zerodur
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