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CuFeO2 Prepared by Electron Cyclotron Wave Resonance-Assisted Reactive HiPIMS with Two Magnetrons and Radio Frequency Magnetron Sputtering

A. Pisarikova,J. Olejnicek, I. Venkrbcova,L. Nozka,S. Cichon, A. Azinfar,R. Hippler,C. A. Helm,M. Maslan,L. Machala,Z. Hubicka

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A（2023）

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