Self-calibrating Gas Pressure Sensor with a 10-Decade Measurement RangeChristoph Reinhardt,Hossein Masalehdan, Sandy Croatto,Alexander Franke, Moritz B. K. Kunze,Jorn Schaffran, Nils Sueltmann,Axel Lindner,Roman SchnabelACS Photonics（2024）引用 1|浏览18关键词optomechanics,nanomechanics,pressure sensing,vacuum technology,nanofluidicsAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
