Fabrication and Soft-X-Ray and EUV Range Testing of Au- and Multilayer Mo/Si-Coated Diffraction Gratings with High-Order Blaze

L. I. Goray,T. N. Berezovskaya,D. V. Mokhov,V. A. Sharov,K. Yu. Shubina,E. V. Pirogov,A. S. Dashkov,A. V. Nashchekin,M. V. Zorina,M. M. Barysheva,S. A. Garakhin,S. Yu. Zuev,N. I. Chkhalo

Bulletin of the Lebedev Physics Institute（2023）

引用 2|浏览20

关键词

blazed diffraction grating,wet Si etching,triangular groove profile,atomic force microscopy,scanning electron microscopy,diffraction efficiency,extreme ultraviolet and soft X-ray ranges

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