Microstructure, Mechanical Properties and Optical Reflectance of TiNiN Films Deposited on Silicon Substrates Using Cathodic Arc Evaporation
Thin Solid Films（2023）
Key words
Titanium nickel nitride,Thin film,Substrate bias,Microstructure,Mechanical properties,Optical reflectance
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined