Effect of Impurities in Vacuum Vessels on the Plasma Parameters in Inductive DischargesYoung-Gi Kim,Deuk-Chul Kwon,Kwan-Yong Kim,Gwang-Seok Chae,Jung-Sik Yoon,Jung-Hyung Kim,Hyo-Chang LeeVACUUM（2023）引用 2|浏览16关键词ICP,Impurity density,Electron density,Global model,Discharge cleaningAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
