谷歌浏览器插件
订阅小程序
在清言上使用
VIPCreated with Sketch.

Small Target Compatible Dimensional and Analytical Metrology for Semiconductor Nanostructures Using X-Ray Fluorescence Techniques

Philipp Hoenicke,Yves Kayser,Victor Soltwisch, Andre Waehlish,Nils Wauschkuhn,Jeroen E. Scheerder,Claudia Fleischmann,Janusz Bogdanowicz,Anne-Laure Charley,Anabela Veloso,Roger Loo,Hans Mertens,Andriy Hikavyy,Thomas Siefke,Anna Andrle,Grzegorz Gwalt,Frank Siewert,Richard Ciesielski,Burkhard Beckhoff

METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVII（2023）

引用 1|浏览0
关键词
X-ray fluorescence,nanostructure metrology,compositional analysis
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要