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Amorphous/Nanocrystalline High-Entropy CoCrFeNiTix Thin Films with Low Thermal Coefficient of Resistivity Obtained Via Magnetron Deposition.

Maksim Poliakov,Dmitry Kovalev,Sergei Vadchenko,Dmitry Moskovskikh,Philipp Kiryukhantsev-Korneev,Lidiya Volkova,Alexander Dudin,Andrey Orlov,Andrey Goryachev,Alexander Rogachev

NANOMATERIALS（2023）

Cited 7|Views20
Key words
high-entropy alloy,amorphous structure,magnetron sputtering,thin films,resistors,microelectronic devices
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