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Reduction of Surface Leakage Current of InAs/GaSb Long-Wavelength Superlattice Detectors Using SiO2 and Anodic Sulfide Composite Passivation

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING(2023)

Cited 5|Views15
Key words
Long-wavelength,InAs,GaSb,Passivation,Photodiodes
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