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Enhanced Performances of A-Igzo TFTs with Oxide Passivation Layers Fabricated by Hollow Cathode Assisted PLD

Chen Wang,Chaofan Zeng,Haiyue Ning,Fengnan Li,Mingxia Liu,Kewei Xu,Fei Ma

JOURNAL OF ALLOYS AND COMPOUNDS（2023）

Cited 6|Views5
Key words
A-IGZO TFTs,Passivation layers,Hollow cathode assisted PLD,Electrical stability
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