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An Analysis of Nonlinear Thickness Vibration Frequencies of Multi-Layered Film Bulk Acoustic Resonators.

Yurun Chen,Yan Guo,Rongxing Wu,Ji Wang,Huimin Jing,Ji Lin,Yahui Tian,Haifeng Zhang

ULTRASONICS（2023）

引用 4|浏览0
关键词
FBAR,SMR,BAW,Nonlinear,Structure,Vibration,Galerkin method
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