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A First-Principles Investigation of the Driving Forces Defining the Selectivity of TiO2 Atomic Layer Deposition

Yukio Kaneda,Rachel A. A. Nye,Esteban A. A. Marques,Silvia Armini,Annelies Delabie,Michiel J. J. van Setten,Geoffrey Pourtois

JOURNAL OF PHYSICAL CHEMISTRY C（2023）

Cited 4|Views1
Key words
Selective Oxidation,Atomic Layer Deposition
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