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Ellipsometric Characterization of Tungsten Oxide Thin Films, Before and after He Plasma Exposure

M. I. Rusu,Y. Addab,C. Martin,C. Pardanaud,V. Savu,I. I. Lancranjan,D. Tenciu

OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS（2023）

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关键词
Tungsten oxide,Thermal oxidation,Thin films,Ellipsometry characterization,Reflectance
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