Study on Surface and Subsurface Qualities in Rotary Ultrasonic Vibration-Assisted Peripheral Grinding of ULE

Guoyan Sun,Feng Shi,Yongsheng Yao,Jiaoteng Ding,Yongjie Wang

Advanced Optical Manufacturing Technologies and Applications 2022 and 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022)（2023）

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