The Influence of the Nanostructure Design on the Optical, Electrical and Thermal Properties of TiNx Thin Films Prepared by Reactive Magnetron Sputtering
Materials Chemistry and Physics（2023）
Key words
Thin films,Nanostructure design,Glancing angle deposition,Microstructure,Roughness,Porosity,Thermal properties,Electrical properties,Optical properties
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