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A Bionic Approach for the Mechanical and Electrical Decoupling of an MEMS Capacitive Sensor in Ultralow Force Measurement

Wendi Gao,Bian Tian,Cunlang Liu, Yingbiao Mi,Chen Jia,Libo Zhao,Tao Liu,Nan Zhu,Ping Yang,Qijing Lin,Zhuangde Jiang,Dong Sun

FRONTIERS OF MECHANICAL ENGINEERING（2023）

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关键词
micro-electro-mechanical system capacitive sensor,bionics,operation instability,mechanical and electrical decoupling,biomedical force measurement
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