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A New DRIE Cut-off Material in SOG MEMS Process

Chaowei Si,Yingchun Fu,Guowei Han,Yongmei Zhao,Jin Ning,Zhenyu Wei,Fuhua Yang

JOURNAL OF SEMICONDUCTORS（2023）

Cited 0|Views21
Key words
SOG process,DRIE cut-off layer,ITO film,foot effect
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