Characterization of Plasma Discharge in a Multi Dipole Line Cusp Magnetic Field Created by an RF Source Coupled by a Spiral Antenna

M. A. Ansari, Amit D. Patel, A. Das Alli,Prabal K. Chattopadhyay, N. Ramasubramanian,Daniel Raju,Raj Singh

IEEE TRANSACTIONS ON PLASMA SCIENCE（2023）

引用 1|浏览11

关键词

High power RF antenna,inductively coupled plasma (ICP),matching network (MN),plasma resistance,spiral antenna,triple Langmuir probe (TLP),vacuum shield flange (VSF)

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要