MEMS Reliability: On-Chip Testing for the Characterization of the Out-of-Plane Polysilicon Strength
MICROMACHINES（2023）
Key words
MEMS stopper,polysilicon,brittle materials,tensile strength,fracture
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined