RF Figures of Merit of Polysilicon Trap-Rich Layers Formed Locally by Ion Amorphization and Nanosecond Laser Annealing
2023 IEEE 23RD TOPICAL MEETING ON SILICON MONOLITHIC INTEGRATED CIRCUITS IN RF SYSTEMS（2023）
Key words
FD-SOI,Radio Frequency,Substrates,Traprich,ion implantation,Nanosecond laser annealing.
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