Bottom-Up Generated Height Gauges for Silicon-Based Nanometrology.
ACS Applied Materials & Interfaces（2023）
关键词
silicon-based gauges,height gauge,singular terraces,step height measurements,atomic force microscopy,optical profilometry
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要