Effects of Mask Material on Lateral Undercut of Silicon Dry Etching.Yongkang Zhang,Zhongxuan Hou,Chaowei Si,Guowei Han,Yongmei Zhao,Xiaorui Lu,Jiahui Liu,Jin Ning,Fuhua YangMicromachines（2023）引用 5|浏览36关键词silicon dry etching,undercut,mask materials,Bosch processAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
