Effect of C2H2 Flow Rate and a Ti/TiN/TiCN Interlayer on the Structure, Mechanical and Tribological Properties of A-C:H Films Deposited Using a Hybrid PVD/PECVD Process with an Anode-Layer Ion Source
VACUUM（2023）
关键词
316L stainless steel,a-C,H film,PVD,PECVD,Ti,TiN,TiCN interlayer
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