H2MEMS Project: Resonant MEMS for Detection of Hydrogen Release in Radioactive Waste Disposal Facility1

Isabelle Dufour,Luis Iglesias Hernandez,Priyadarshini Shanmugam,Jean-François Michaud,Laurent Colin,Daniel Alquier,Dominique Certon,Maria-Dolores Manrique-Juarez,Thierry Leïchlé,Fabrice Mathieu,Laurent Mazenq,Liviu Nicu,Luan Nguyen,Sébastien Chenot,Marc Portail,Johan Bertrand

2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)（2022）

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resonant MEMS,CMUT,microcantilever,gas detection,resonant frequency,quality factor,time of flight,viscosity,mass density,sound attenuation,hydrogen detection

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