Highly selective GaAs/AlGaAs dry etching using HBr/SF6/HeMichael Barrow,Shawn Wright,Sarah Puzycki,Piyush Shah,Robert Bedford,Yuanchang Zhang,Jamie PhillipsJournal of Vacuum Science & Technology B（2021）引用 0|浏览3AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
