Atomic Layer Deposited Al2O3 As a Protective Overlayer for Focused Ion Beam Preparation of Plan-View STEM Samples
Ultramicroscopy（2022）
Key words
High angle annular dark field (HAADF),Scanning tunneling electron microscopy,(STEM),Focused ion beam (FIB),Atomic layer deposition (ALD),Thin film,Plan-view
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