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CHARACTERIZATIONS OF OPTIMIZED MICROSHUTTER ARRAYS FOR SPACE BORNE OBSERVATORY APPLICATIONS

Kyowon Kim,Ming Ke,Matthew A. Greenhouse,Alexander S. Kutyrev,Rainer Fettig,Stephan R. McCandliss,Carl A. Kotecki,Regis P. Brekosky,Gang Hu, Beth M. Paquette,Timothy M. Miller, Frederick H. Wang,Nicholas P. Costen,Samelys Rodriguez, Vorachai Kluengpho, Knute A. Ray, Eduardo J. Aguayo, Kenneth M. Simms,Meng-Ping Chang

2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS)（2022）

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关键词
Electrostatic,MEMS actuator,microshutter array,multi-object spectroscopy
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