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Nano-diffractive Elements in BSI Pixel CMOS Image Sensors: Optical Design and Process Integration Co-Optimization with Pixel Scaling

M. Barlas,A. Crocherie,F. Bardonnet,Q. Abadie, E. Sungauer,M. Vignetti,B. Mamdy,I Nicholson, P. G. D'Aillon,A. R. Bianchi,G. Mugny,D. Golanski,F. Domengie,P. Besson, E. Prevost, L. Parmigianni, J. Arnaud,H. Wehbe-Alause,A. Tournier,O. Noblanc,K. Rochereau

INTEGRATED OPTICS DEVICES, MATERIALS, AND TECHNOLOGIES XXVI（2022）

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