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Experimental and Theoretical Determination of the Role of Ions in Atomic Layer Annealing

Scott T. Ueda,Aaron McLeod,Youhwan Jo,Zichen Zhang,Jacob Spiegelman,Jeff Spiegelman,Dan Alvarez,Daniel Moser,Ravindra Kanjolia,Mansour Moinpour,Jacob Woodruff,Kyeongjae Cho,Andrew C. Kummel

Journal of materials chemistry C（2022）

Cited 9|Views5

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