Effect of the Parameters of Grain Misorientation in Multicrystalline Silicon on the Formation of the SEM Image Contrast

Peshcherova S. M.,Chueshova A. G.,Zimin M. D.,Ludina E. A.,Pavlova L. A.,Nepomnyashchikh A. I., Zubritcky S. M., Ribyakov M. Yu., Dovchenko L. K.

Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques（2022）

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multicrystalline silicon,intergranular boundaries,scanning electron microscopy,backscattered electron diffraction,special slope boundaries,macrostructure,identification,SEM image contrast

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