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MEMS Microgravity Measurement Module with Nano-g/Hz Noise Floor for Spaceborne Higher-Level Microgravity Scientific Experiment Applications

Qiu Wang,Zongfeng Li,Huafeng Liu,Qiangwei Xu,Shitao Yan,Leiming Zhang,Shaolin Zhang,Xiaoxiao Song,Ziqiang Qu,Li Liu,Jinquan Liu,Liangcheng Tu

ACS APPLIED ELECTRONIC MATERIALS（2021）

引用 12|浏览29
关键词
MEMS,accelerometer,space,microgravity measurement,on-orbit test,nano-g
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