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Comparison of Surface and Subsurface Damage of Mosaic Single-Crystal Diamond Substrate Processed by Mechanical and Plasma-Assisted Polishing

Nian Liu,Hideaki Yamada,Naoya Yoshitaka,Kentaro Sugimoto,Rongyan Sun,Kentaro Kawai,Kenta Arima,Kazuya Yamamura

Diamond and Related Materials（2021）

Cited 12|Views19
Key words
Mosaic single-crystal diamond,Mechanical polishing,Plasma-assisted polishing,Subsurface damage,Cathodoluminescence,Raman spectroscopy
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