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Mechanical Design of a Flexural Nanopositioning Stage System for Hard X-Ray Nanofocusing at the Advanced Photon Source 32-ID-C Station

Deming Shu,Vincent De Andrade,Jayson Anton,Steven Kearney,Kamel Fezzaa,Sunil Bean,Alex Deriy,Wenjun Liu,Jorg Maser,Barry Lai,Jonathan Z. Tischler,Francesco De Carlo

X-RAY NANOIMAGING INSTRUMENTS AND METHODS IV（2019）

Cited 3|Views12
Key words
x-ray optics,nanopoaitioning,precision motion control
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