Thin-Entrance Window Process for Soft X-Ray SensorsJulie Segal,Christopher Kenney,Jeffrey M. Kowalski,Jeffrey E. Kowalski,Gabriel Blaj,Lisa Rozario,Jasmin Hasi,Angelo Dragone,Pietro Caragiulo,Lorenzo RotaFRONTIERS IN PHYSICS（2021）引用 5|浏览29关键词silicon sensors,x-ray sensors,micro-wave anneal,soft x-rays,silicon processingAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
