Influence of Magnetic Field Configuration on Plasma Characteristics and Thin Film Properties in Dual Magnetron Reactive High Power Impulse Magnetron Sputtering Discharge with Al in Ar/O2 Mixture
SURFACE & COATINGS TECHNOLOGY（2021）
关键词
Dual magnetron sputtering,Magnetic field configuration,HiPIMS,Langmuir probe,Mass spectrometry,Al2O3 film
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