Pyrolyzed Microstructures Made by Two-Photon Polymerization: Comparative Study

Margarita Sharipova,Tigran G. Baluyan,Ksenia A. Abrashitova, Grigory E. Kulagin,Alexander K. Petrov,Artem S. Chizhov,Tatyana B. Shatalova,Dmitry Chubich,Daniil A. Kolymagin,Alexey G. Vitukhnovsky,Vladimir O. Bessonov,Andrey A. Fedyanin

Optical Materials Express（2021）

Cited 29|Views24

Key words

pyrolyzed microstructures,two-photon polymerization,two-photon lithography,chemical composition,pyrolyzed TPP-made structures,annealing temperature,solid objects,pyrolysis temperatures,pyrolysis-induced changes,adhesion,SEM images,microcube shrinks,thermogravimetric analysis,scanning electron microscopy,X-ray energy dispersive analysis,temperature 450.0 degC,temperature 690.0 degC

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