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Study of Surface Quality and Subsurface Damage of Germanium Optics Produced by Single Point Diamond Nanomachining

EUV and X-ray Optics Synergy between Laboratory and Space VI(2019)

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Key words
Nanomachining,Single point diamond technology,X-ray crystal optics,Germanium,Atomic force microscopy,Micro Raman spectroscopy,Rocking curve imaging
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