WeChat Mini Program
Old Version Features

Si-containing Block Copolymers for Self-Assembled Nanolithography

C. A. Ross,Y. S. Jung,V. P. Chuang,F. Ilievski,J. K. W. Yang,I. Bita,E. L. Thomas,Henry I. Smith,K. K. Berggren,G. J. Vancso,J. Y. Cheng

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena（2008）

Cited 97|Views2
Key words
etching,nanolithography,nanopatterning,polymer blends,polymer films,self-assembly,silicon compounds
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined