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A Method for Improving Out-of-plane Robustness of an Area-Changed Capacitive Displacement Transducer Used in a Micro-Accelerometer

Shitao Yan,Huafeng Liu,Qiangwei Xu,Dandan Liu,Mengqi Zhang,Wenjie Wu,Liangcheng Tu

Sensors and Actuators A Physical（2020）

Cited 6|Views20
Key words
Out-of-plane robustness,Area-changed capacitive displacement transducer,On-chip capacitor,Micro-accelerometer,MEMS
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